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The evaluation apparatus of a compound semiconductor thin film, the evaluation method of a compound semiconductor thin film, and the manufacturing method of a solar cell.
The evaluation apparatus of a compound semiconductor thin film, the evaluation method of a compound semiconductor thin film, and the manufacturing method of a solar cell.
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机译:化合物半导体薄膜的评价装置,化合物半导体薄膜的评价方法以及太阳能电池的制造方法。
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摘要
PROBLEM TO BE SOLVED: To provide a compound semiconductor thin film evaluation device which can detect a partial defect in a compound semiconductor thin film and inspect the whole of the compound semiconductor thin film.SOLUTION: A compound semiconductor thin film evaluation device 2 of the present invention comprises a light transmissive exterior package 4 on which an opening is formed, a light transmissive polymer gel electrolyte layer 6 disposed on inside the opening to close the opening, an electrolytic solution 12 infiltrating the polymer gel electrolyte layer 6, a light source 18 disposed on inside the exterior package 4 for irradiating a surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4 with light, a counter electrode 8 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, a reference electrode 10 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, and a potentiostat 60 to which the counter electrode 8 and the reference electrode 10 are electrically connected.
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