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Alignment and system for synchronizing a method and apparatus for target material for optimal EUV output
Alignment and system for synchronizing a method and apparatus for target material for optimal EUV output
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机译:用于使目标材料的方法和设备同步以实现最佳EUV输出的对准和系统
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摘要
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first catch including a first open end substantially aligned to the target material path and at least one internal surface oriented toward a second end of the first catch, the second end being opposite from the first open end.
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