Workpiece precision laminating apparatus and workpiece precision laminating method

摘要

Provided is a precision gluing device that can glue precisely positioned workpieces to each other and can glue the workpieces together precisely even when the workpieces shift during gluing. The device is equipped with a lower suction pad (7) and an upper suction pad (8). Highly precise positioning indicators (5R, P1) are provided on each workpiece (W1, W2). The lower suction pad (7) is provided with workpiece-supporting trays (10) for adhering the first workpiece (W1), a terminal support tray (18), a gluing roller (11) and a first alignment device (12). The upper suction pad (8) is provided with an adhesion tray (44) for adhering the second workpiece (W2) and a second alignment device (45). Images of the positioning indicators (5R, P1) are captured with CCD cameras (C6, C7) and positional deviations are detected. The position of the adhesion tray (44) is adjusted with the second alignment device (45) and the two workpieces (W1, W2) are precisely positioned. During gluing, positional deviations of the first workpiece (W1) are monitored with a positional deviation-monitoring camera (C8) and the two workpieces (W1, W2) are glued together while correcting the position of the terminal support tray (18) with the first alignment device (12) according to the positional deviation.