Alignment adjustment method, alignment adjustment apparatus, and laser processing apparatus provided with alignment adjustment apparatus

摘要

PROBLEM TO BE SOLVED: To provide an alignment regulation device capable of position-aligning precisely and easily a focal point of a laser beam with respect to an axis of a liquid jet flow, in a laser beam machining device.SOLUTION: The alignment regulation device 10 includes a relative moving mechanism 34 for moving relatively a jet nozzle 20 and an optical fiber 22, an imaging means 37 for photographing an image Q of an inlet opening part 20a of the jet nozzle 20 and an image R of a laser image, and an alignment control means for controlling the relative moving mechanism 34, based on the images Q, R, and the alignment control means is constituted to execute (a) a step of finding the center of the inlet opening part 20a, based on the image Q, (b) a step of finding the center of the laser image, based on the image R, and (c) a step of moving the optical fiber 22 with respect to the jet nozzle 20, by driving the relative moving mechanism 34 so as to make the center of the laser image consistent with the center of the inlet opening part 20a.