Fe-Co-Ni -based alloy sputtering target material .

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target material of an Fe-Co-Ni-based alloy having low magnetic permeability, which can improve the efficiency of use in the magnetron sputtering, and can increase the plate thickness of the target.;SOLUTION: The sputtering target material of the Fe-Co-Ni-based alloy is formed of a sintered body having such a composition ratio as to satisfy Fe:Ni=90:10 to 65:35 and (Fe+Ni):Co=90:10 to 10:90 by atom ratio, and includes crystal phases containing 35 atom% or less Ni, 15 atom% or less Co and mainly Fe in the structure of the sintered target material, in which the ratio Ifcc(200)/Ibcc(200) of X-ray diffraction peak intensity (Ifcc(200)) obtained from the (200) face of the fcc phase containing mainly Fe of the crystal phases containing mainly Fe, to X-ray diffraction peak intensity (Ibcc(200)) obtained from the (200) face of the bcc phase containing mainly Fe is 10 or more.;COPYRIGHT: (C)2011,JPO&INPIT