physical and chemical sensors and the physical and chemical phenomena sensing device and methods for their preparation

摘要

It is possible to detect changes in the microscopic surface stress, and physical and chemical sensors that enable smaller and arrayed to provide the physical and chemical phenomena sensing devices and their manufacturing methods. The sensor, while forming a hollow portion 3 on the surface of the light-receiving surface 1a of the photodiode 1, and a film portion 2 which is provided to face the hollow portion is airtight or watertight manner isolated from the surroundings, the membrane unit has an optical transparency and flexibility, so as to form a Fabry-Perot cavity together with surfaces of the light-receiving surface. Sensing devices, providing a reference sensor does not have a hollow portion in addition to the sensor. Production process to produce the steps of generating a sacrificial layer on the light receiving surface of the photodiode, a step of laminating a protective film in a region except the surface of the sacrificial layer, the film portion to the membrane portion configured region excluding the etching planned regions process When it comprises a step of etching the sacrificial layer, a step of coating the etched planned area.