Physical and chemical sensor and physical and chemical phenomenon sensing device and manufacturing method thereof

摘要

[Problem] To provide a physical/chemical sensor and physical/chemical phenomenon sensing device capable of reducing a reaction time on a movable film and a method for manufacturing the same. [Solution] A physical/chemical sensor forms a Fabry-Perot interferometer, has a flow path formation layer (4) laminated on the surface of a movable film (3), and has formed therein a hollow part (41) and a flow path (42) connected thereto. A physical/chemical phenomenon sensing device is provided with a plurality of physical/chemical sensors, divides the sensors into sensors for detection (100) and sensors for reference (200), and is made to be capable of supplying an analyte and reference sample to a movable film through different flow paths and hollow parts. In a manufacturing method for the physical/chemical sensor and physical/chemical phenomenon sensing device, a sacrificial layer is laminated on a substrate, and in a final step after a resist is used to form the flow path formation layer, the sacrificial layer is etched.