Spatial light modulation element manufacturing method, spatial light modulation element, spatial light modulator, and exposure apparatus

摘要

A spatial light modulation element formed on a substrate, a flat portion movable with respect to the substrate, a flat plate attached to the flat portion, and a surface of the flat plate opposite to the attachment surface, and reflects incident light. And a dielectric film. In the spatial light modulation element, the dielectric film may include two or more dielectric layers that are stacked on each other and have a refractive index different from that of an adjacent layer. In the spatial light modulator, the dielectric film may be formed by alternately laminating Al ₂ O ₃ films and SiO ₂ films.