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POLYMERIC MATERIALS IN SELF-ASSEMBLED ARRAYS AND SEMICONDUCTOR STRUCTURES AND METHODS COMPRISING SUCH POLYMERIC MATERIALS
POLYMERIC MATERIALS IN SELF-ASSEMBLED ARRAYS AND SEMICONDUCTOR STRUCTURES AND METHODS COMPRISING SUCH POLYMERIC MATERIALS
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机译:自组装阵列和半导体结构中的高分子材料以及包含这种高分子材料的方法
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摘要
Methods for fabricating sublithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. Semiconductor structures may include self-assembled block copolymer materials in the form of lines of half-cylinders of a minority block matrix of a majority block of the block copolymer. The lines of half-cylinders may be within trenches in the semiconductor structures.
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