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MECHANISMS FOR FORMING POST-PASSIVATION INTERCONNECT STRUCTURE

机译:钝化后互连结构的形成机理

摘要

Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a contact pad over a substrate. The semiconductor device also includes a passivation layer over the substrate and a first portion of the contact pad, and a second portion of the contact pad is exposed through an opening. The semiconductor device further includes a post-passivation interconnect layer over the passivation layer and coupled to the second portion of the contact pad. In addition, the semiconductor device includes a bump over the post-passivation interconnect layer and outside of the opening. The semiconductor device also includes a diffusion barrier layer physically insulating the bump from the post-passivation interconnect layer while electrically connecting the bump to the post-passivation interconnect layer.
机译:提供了用于形成半导体器件的机构的实施例。半导体器件包括在衬底上方的接触垫。该半导体器件还包括在衬底和接触垫的第一部分上方的钝化层,并且接触垫的第二部分通过开口暴露。半导体器件还包括在钝化层上方并且耦合至接触焊盘的第二部分的钝化后互连层。另外,半导体器件包括在钝化后互连层上方和开口外部的凸块。该半导体器件还包括扩散阻挡层,该扩散阻挡层将凸块与钝化后互连层物理地绝缘,同时将凸块电连接到钝化后互连层。

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