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DISPLAY DEVICE COMPRISING A TFT WITH A BARRIER METAL FORMED OF A FIRST LAYER AND A SECOND LAYER WHEREIN AN AMOUNT OF OXYGEN IN THE FIRST LAYER IS LARGER THAN IN THE SECOND LAYER
DISPLAY DEVICE COMPRISING A TFT WITH A BARRIER METAL FORMED OF A FIRST LAYER AND A SECOND LAYER WHEREIN AN AMOUNT OF OXYGEN IN THE FIRST LAYER IS LARGER THAN IN THE SECOND LAYER
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机译:一种显示设备,其中包含具有第一层和第二层的阻挡层金属的TFT,而第二层中的氧气量大于第二层
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摘要
An organic EL display device includes scanning lines, video signal lines, and pixels, each including a TFT having a semiconductor layer and an organic EL layer located between a lower electrode and an upper electrode. A source electrode connecting the semiconductor layer and the lower electrode is formed of three layers including a barrier metal, an Al-containing metal, and a cap metal. The barrier metal is formed of a first layer in contact with the semiconductor layer and a second layer in contact with the Al-containing metal. Each of the first layer, the second layer, and the cap metal is formed of a metal comprising a high melting point metal, and an amount of oxygen in the first layer is larger than an amount of oxygen in the second layer.
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