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ACTIVE LATERAL FORCE STICTION SELF-RECOVERY FOR MICROELECTROMECHANICAL SYSTEMS DEVICES
ACTIVE LATERAL FORCE STICTION SELF-RECOVERY FOR MICROELECTROMECHANICAL SYSTEMS DEVICES
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机译:微机电系统设备的主动侧向力自恢复
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摘要
A mechanism for recovering from stiction-related events in a MEMS device through application of a force orthogonal to the stiction force is provided. A small force applied orthogonal to the vector of a stiction force can release the stuck proof mass easier than a force parallel to the vector of the stiction force. Example embodiments provide a vertical parallel plate or comb-fingered lateral actuator to apply the orthogonal force. Alternate embodiments provide a proof mass of a second transducer to impact a stuck MEMS actuator to release stiction.
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