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Bulk silicon wafer product useful in the manufacture of three dimensional multigate MOSFETs
Bulk silicon wafer product useful in the manufacture of three dimensional multigate MOSFETs
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机译:适用于制造三维多栅极MOSFET的块状硅片产品
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摘要
A method for preparing a semiconductor structure for use in the manufacture of three dimensional transistors, the structure comprising a silicon substrate and an epitaxial layer, the epitaxial layer comprising an endpoint detection epitaxial region comprising an endpoint detection impurity selected from the group consisting of carbon, germanium, or a combination.
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