BELL JAR EXTRACTION TOOL METHOD AND APPARATUS FOR THIN FILM PHOTOVOLTAIC MATERIALS

摘要

An apparatus for extracting a bell jar chamber from a processing station of a thin film photovoltaic material is provided. The apparatus includes a rack fixture coupled to a robot loader. The rack fixture is configured to support the bell jar chamber to be moved using the robot loader in a horizontal direction and in a vertical direction. The apparatus further includes at least two support members configured within a vicinity of an upper region of the rack fixture.