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AMORPHOUS CARBON FILM, PROCESS FOR FORMING AMORPHOUS CARBON FILM, ELECTRICALLY CONDUCTIVE MEMBER AND FUEL CELL BIPOLAR PLATE HAVING AMORPHOUS CARBON FILM
AMORPHOUS CARBON FILM, PROCESS FOR FORMING AMORPHOUS CARBON FILM, ELECTRICALLY CONDUCTIVE MEMBER AND FUEL CELL BIPOLAR PLATE HAVING AMORPHOUS CARBON FILM
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机译:非晶碳膜,非晶碳膜的形成工艺,具有非晶碳膜的导电性构件和燃料电池双极性板
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摘要
An amorphous carbon film contains carbon as a main component, not more than 30 at. % of hydrogen, not more than 20 at. % of nitrogen and not more than 3 at. % of oxygen (all excluding 0 at. %), and when the total amount of the carbon is taken as 100 at. %, the amount of carbon having an sp2 hybrid orbital is not less than 70 at. % and less than 100 at. %. Nitrogen and oxygen are concentrated on a surface side of the film and when detected from a surface layer by X-ray photoelectron spectroscopy, oxygen content ratio is not less than 4 at. % and not more than 15 at. % and nitrogen content ratio is not less than 10 at. % and not more than 30 at. %. The amorphous carbon film attains both electric conductivity and hydrophilicity and exhibits suitable surface characteristics to a fuel cell bipolar plate, etc.
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