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Integrated circuit product yield optimization using the results of performance path testing

机译:使用性能路径测试的结果来优化集成电路产品的良率

摘要

Disclosed are embodiments of a method, system and computer program product for optimizing integrated circuit product yield by re-centering the manufacturing line and, optionally, adjusting wafer-level chip dispositioning rules based on the results of post-manufacture (e.g., wafer-level or module-level) performance path testing. In the embodiments, a correlation is made between in-line parameter measurements and performance measurements acquired during the post-manufacture performance path testing. Then, based on this correlation, the manufacturing line can be re-centered. Optionally, an additional correlation is made between performance measurements acquired during wafer-level performance testing and performance measurements acquired particularly during module-level performance path testing and, based on this additional correlation, adjustments can be made to the wafer-level chip dispositioning rules to further minimize yield loss.
机译:公开了一种方法,系统和计算机程序产品的实施例,该方法,系统和计算机程序产品用于通过使生产线重新居中并根据制造后的结果(例如,晶圆级)来可选地调整晶圆级芯片布置规则来优化集成电路产品产量或模块级)性能路径测试。在实施例中,在在线参数测量和在制造后性能路径测试期间获取的性能测量之间进行相关。然后,基于此相关性,可以将生产线重新定中心。可选地,在晶片级性能测试期间获得的性能测量结果与特别是在模块级性能路径测试期间获得的性能测量结果之间进行附加的关联,并且基于此附加的关联性,可以对晶片级芯片的布置规则进行调整以进一步降低产量损失。

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