Device for supplying the liquid material inside a filling container and method of controlling the liquid level inside the filling container for said liquid material supply device

摘要

Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.