DEVICE FOR SUPPLYING THE LIQUID MATERIAL INSIDE A FILLING CONTAINER AND METHOD OF CONTROLLING THE LIQUID LEVEL INSIDE THE FILLING CONTAINER FOR SAID LIQUID MATERIAL SUPPLY DEVICE

摘要

Methods and apparatus for supplying a liquid and controlling its level inside of a container, in particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, such the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.