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Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
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机译:纳米尖端垫片可实现MEMS结构中的精确间隙控制和热隔离
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摘要
A THz radiation detector comprising a vertical antenna separated from a suspended platform by an isolating thermal air gap for concentrating THz radiation energy into a smaller suspended MEMS platform upon which a thermal sensor element is located. THz photon energy is converted into electrical energy via a thermally isolated air gap between plates of a coupling capacitor separated by a plurality of nano-tip spacers that determine the gap distance. The capacitor couples energy from the antenna to the thermal sensor.
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