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CMOS-compatible silicon nano-wire sensors with biochemical and cellular interfaces
CMOS-compatible silicon nano-wire sensors with biochemical and cellular interfaces
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机译:具有生化和细胞界面的CMOS兼容硅纳米线传感器
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摘要
The systems and methods described herein include a sensor for suitable for sensing chemical and biological substances. The sensor comprises a semiconductor layer formed in or on a substrate and a channel having nano-scale dimensions formed in the semiconductor layer, where the structure creates an electrically conducting pathway between a first contact and a second contact on the semiconductor layer. In certain preferred embodiments, the nano-scale channel has a trapezoidal cross-section with an effective width and exposed lateral faces, where the effective width is selected to have same order of magnitude as a Debye length (LD) of the semiconductor material of which the semiconductor layer is formed.
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机译:本文描述的系统和方法包括适合于感测化学和生物物质的传感器。该传感器包括在衬底中或衬底上形成的半导体层以及在半导体层中形成的具有纳米尺度尺寸的通道,其中该结构在半导体层上的第一触点和第二触点之间产生导电路径。在某些优选实施方案中,纳米级通道具有具有有效宽度和暴露的侧面的梯形横截面,其中有效宽度被选择为与德拜长度(L D Sub >)形成半导体层的半导体材料。
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