Tunable evanescent-mode cavity filter

摘要

A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8:1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18×30×4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8:1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650.