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MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
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机译:MEMS加速度计,检测质量沿垂直于基板平面的反相方向移动
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摘要
A sensor is disclosed. The sensor includes a substrate and at least two proof masses. The sensor also includes a flexible coupling between the at least two proof masses and the substrate. The at least two coupling proof masses move in an anti-phase direction normal to a plane of the substrate in response to acceleration.
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