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Aqueous acidic solution and etching solution and method for texturizing the surface of single crystal and polycrystal silicon substrates

机译:酸性水溶液和蚀刻溶液以及用于使单晶和多晶硅衬底的表面纹理化的方法

摘要

An aqueous acidic solution and an aqueous acidic etching solution suitable for texturizing the surface of single crystal and polycrystal silicon substrates, hydrofluoric acid; nitric acid; and at least one anionic polyether, which is surface active; a method for texturizing the surface of single crystal and polycrystal silicon substrates comprising the step of (1) contacting at least one major surface of a substrate with the said aqueous acidic etching solution; (2) etching the at least one major surface of the substrate for a time and at a temperature sufficient to obtain a surface texturization consisting of recesses and protrusions; and (3) removing the at least one major surface of the substrate from the contact with the aqueous acidic etching solution; and a method for manufacturing photovoltaic cells and solar cells using the said solution and the said texturizing method.
机译:适于使单晶和多晶硅衬底的表面纹理化的酸性水溶液和酸性蚀刻水溶液为氢氟酸;硝酸至少一种具有表面活性的阴离子聚醚;一种使单晶和多晶硅衬底的表面纹理化的方法,该方法包括以下步骤:(1)使衬底的至少一个主表面与所述酸性腐蚀液接触。 (2)在足以获得由凹凸构成的表面纹理化的时间和温度下蚀刻衬底的至少一个主表面。 (3)从与酸性蚀刻液的接触中除去基板的至少一个主表面。以及使用所述溶液和所述织构化方法制造光伏电池和太阳能电池的方法。

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