'process for producing anti-reflective coatings with scratch resistance property'

摘要

The invention relates to a method for producing coatings having anti-reflection property combined with high scratch resistant property. This is achieved by a coating structure with a composite top layer comprising at least one type of metal oxide or silane compound with low refractive index SiOn layer. The above composite layer is applied on to a high refractive metal oxide layer, either Titania or Zirconia. Employing the method according to the invention, a bilayer coating providing anti-reflection with scratch resistant property can be easily applied on glass, silicon wafers and solar receiver tubes for both optical and solar energy conversion applications.