Bond Heads For Thermocompression Bonders, Thermocompression Bonders, And Methods Of Operating The Same

摘要

A bond head for a thermocompression bonder is provided. The bond head includes a tool configured to hold a workpiece to be bonded, a heater configured to heat the workpiece to be bonded, and a chamber proximate the heater. The chamber is configured to receive a cooling fluid for cooling the heater.