SAMPLE HOLDER AND FOCUSED-ION-BEAM MACHINING DEVICE PROVIDED THEREWITH

摘要

In order to implement a focused-ion-beam machining device that is capable of machining thin samples that are large in surface area and uniform in thickness or needle-like samples having sharp tips, in this focused-ion-beam machining device, which is provided with an ion source (1), an electron lens (3) that focuses an ion beam (2) from said ion source (1) onto a sample (5), and a sample holder (13) that holds said sample (5), said sample holder (13) is provided with a shielding electrode (7), said shielding electrode (7) being laid out so as to cover the sample (5) and also being insulated therefrom such that voltages can be applied to the sample (5) and the shielding electrode (7) separately.