MEASUREMENT CONTROL SYSTEM FOR MULTI-SHAFT SUPPORTED AIR FLOATATION PLATFORM

摘要

A measurement control system for a multi-shaft supported air floatation platform, the system comprising a load feedback unit (5), an execution unit (6), a position measurement unit (7), a safety protection unit (8), a controller (9), a rotating motor (10), and a linear light source (11); the load feedback unit comprises M pressure sensors (5-1) and four differential sensors (5-2); the execution unit comprises M servo voice coil motors (6-1) and M servo voice coil motor drivers (6-2); the position measurement unit comprises a plane grating (7-1), M linear gratings (7-2), a linear array CCD (7-3), a tilt sensor (7-4), M electronic levels (7-5), and an indoor GPS (7-6); the safety protection unit comprises 2M proximity sensors (8-1) and M temperature sensors (8-2); and the linear array CCD consists of no fewer than six CCDs. The system solves the problems of leveling limitations and narrow application range of existing supporting platforms.