METHOD AND DEVICE FOR THE PLASMA-AIDED TREATMENT OF SURFACES

摘要

A method and a series of devices for dry cleaning, activating, modifying, coating, and biologically decontaminating (degerming, disinfecting, sterilizing) surfaces by means of an atmospheric pressure plasma generated using a surface barrier discharge are provided. The invention is used for dry cleaning, activating, coating, modifying, and biologically contaminating surfaces by means of an atmospheric pressure plasma generated in a defined, flowing gas atmosphere by a surface barrier discharge, comprising a high-voltage electrode that is covered with a dielectric or ferroelectric material, an electrically conducting grounded contact electrode, a high-voltage supply, a gas supply, and a gas nozzle (encompassing a gas outlet); said gas nozzle is located in the direct vicinity of the grounded contact electrode, is integrated into the contact electrode, or acts as the grounded contact electrode.