BURIED SOURCE SCHOTTKY BARRIER THIN FILM TRANSISTOR AND METHOD OF MANUFACTURE

摘要

A Schottky source-gated thin film transistor is provided including: a drain contact; an insulating substrate; a source contact made of a Schottky metal; a channel connecting the buried source contact to the drain, the channel made of ZnO; and a Schottky source barrier formed between the source contact and the channel; and a gate; wherein the source contact is positioned below the channel.