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SAW FOR CUTTING SILICON INTO SEED RODS FOR USE IN A CHEMICAL VAPOR DEPOSITION POLYSILICON REACTOR
SAW FOR CUTTING SILICON INTO SEED RODS FOR USE IN A CHEMICAL VAPOR DEPOSITION POLYSILICON REACTOR
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机译:用于将硅切成种子棒的锯,用于化学气相沉积多晶硅反应器
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摘要
Saw for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor Systems and methods are provided for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor. A method includes cutting the silicon ingot with saw blades into silicon slabs, rotating the silicon slabs, and cutting the silicon slabs into smaller-sized silicon seed rods for use in the chemical vapor deposition polysilicon reactor.
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