Method and system for operating a MEMS tuning fork gyroscope

摘要

Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of a first proof mass (102) between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode (108) out-of-plane from and proximate a second side of the first proof mass (102) between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode (107). The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass (102) by first demodulating an out-of-plane signal from the first proof mass (102) at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass (102).