BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREOF, AND RADIO FREQUENCY DEVICE USING BULK ACOUSTIC WAVE RESONATOR

摘要

Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.