首页> 外国专利> CROSS SECTION SAMPLE PREPARATION APPARATUS AND ROTATIONAL CROSS SECTION SAMPLE PREPARATION APPARATUS

CROSS SECTION SAMPLE PREPARATION APPARATUS AND ROTATIONAL CROSS SECTION SAMPLE PREPARATION APPARATUS

机译:横截面样品制备装置和旋转横截面样品制备装置

摘要

The present invention relates to a cross section sample preparation apparatus and a rotational cross section sample preparation apparatus which enable preparation of a sample for scanning electron microscope (SEM) analysis, and each of the apparatuses may comprise: at least one first milling machine for irradiating a first surface of a target with a first beam so as to mill the first surface; and at least one second milling machine for irradiating a second surface, which is the opposite surface to the first surface of the target, with a second beam so as to mill the second surface.
机译:截面样品制备装置和旋转截面样品制备装置技术领域本发明涉及能够制备用于扫描电子显微镜(SEM)分析的样品的截面样品制备装置和旋转截面样品制备装置,并且每个装置可包括:至少一个用于辐照的第一研磨机。具有第一光束的目标的第一表面,以铣削第一表面;至少一个第二铣削机,用于向第二表面照射与靶材的第一表面相对的第二表面,以铣削第二表面。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号