VIBRATION MEASUREMENT APPARATUS, VIBRATION MEASUREMENT METHOD, AND OPTICAL SYSTEM FOR VIBRATION MEASUREMENT APPARATUS

摘要

The vibration measurement apparatus according to the present invention comprises: a laser range finder for obtaining geometry information about a vibration measurement point of a target object; a laser scanning vibration measurement device for measuring vibration components at the vibration measurement point by irradiating a laser beam to the vibration measurement point at which the vibration of the target object is to be measured; and an optical filter which reflects one of a first laser irradiated by the laser range finder and a second laser irradiated by the laser scanning vibration measurement device, and transmits the other so that the laser range finder and the laser scanning vibration measurement device can be simultaneously operated. By using a common optical path which facilitates path matching, the present invention has the advantages of being easily manufactured and removing concerns about measurement error. Further, since geometry measurement and vibration measurement can be simultaneously performed, it is possible to obtain the advantage of shortening the operation time of a product. Accordingly, it is possible to solve a problem concerning an increase in operation time, which becomes a problem in the case of using a single laser scanning vibration measurement device. In addition, the optical system is intensive and can resolve light distortion, thereby solving the problem caused by alignment mismatch of light. Also, the operating performance of the vibration measurement device can be improved by simply adding an optical geometry measurement system to conventional apparatuses provided with only laser scanning vibration measurement devices.