VIBRATION MEASUREMENT APPARATUS, VIBRATION MEASUREMENT METHOD, OPTICAL SYSTEM FOR THE VIBRATION MEASUREMENT APPARATUS

摘要

A vibration measuring device according to the present invention comprises: a laser distance measuring device capable of obtaining shape information regarding a vibration measuring point of a measured object; a laser scanning vibration measuring device capable of measuring vibration contents for the vibration measuring point by irradiating the vibration measuring point to measure vibrations of the measured object with laser beam; and an optical filter capable of operating the laser distance measuring device and the laser scanning vibration measuring device at the same time by reflecting between the first laser irradiated from the laser distance measuring device and the second laser irradiated from the laser scanning vibration measuring device and transmitting to the other one. According to the present invention, the production is easily executed with a path match because the same optical path is used. Concerns about measuring errors are eliminated. Moreover, an advantage in which operating time of a product is reduced can be obtained because shape measurement and vibration measurement are executed at the same time. Thus, an operating time increase which becomes a problem when one laser scanner vibration measuring device is used is solved. Moreover, a problem by optical alignment discordance can be solved because the system of an optical system is intensive and optical warping is solved. Furthermore, the operating performance of the vibration measuring device can be improved by simply adding a shape measuring optical system to an existing device in which only the laser scanning vibration measuring device is provided.