Reflective optical element for oblique incidence in the EUV wavelength range

摘要

In order to improve the angular bandwidth of reflective optical elements (100) for grazing incidence in the extreme ultraviolet wavelength range, such a (100) is proposed which has a reflective coating (120) on a substrate (110), wherein the reflective coating (120) boron and has a thickness (D) of more than 50 nm.