ULTRAPRECISE MECHANICAL MOTION CONTROL APPARATUS

摘要

An ultraprecise mechanical motion control apparatus comprises a linear shaft (1) made of a non-magneto-conductive material. The linear shaft (1) is in sleeved connection with a shaft sleeve (2). A plurality of first magnets (3) fixed and arranged at intervals are disposed in the linear shaft (1). Second magnets are disposed in the shaft sleeve (2). Magnetic pole directions of the first magnets (3) and the second magnets are parallel to an axial direction of the linear shaft (1). The shaft sleeve (2) performs axial reciprocating mechanical motion along the linear shaft by means of magnetic fields produced by the first magnets (3) and the second magnets. A high air pressure inlet (5) is formed in the shaft sleeve (2). The inner annular wall of the shaft sleeve (2) in contact with the linear shaft (1) is provided with air holes. One of the first magnets (3) and the second magnets is permanent magnets, and the other is non-permanent magnets. Air is used as a medium between the shaft sleeve (2) and the linear shaft (1), and accordingly, the friction force between the shaft sleeve (2) and the linear shaft (1) during the mechanical motion process is reduced.