PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING - PART 2: A NEW APPROACH TO ULTRA-PRECISION MOTION CONTROL

机译：用于超精密定位的气动伺服轴承执行器-第2部分：超精密运动控制的新方法

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摘要

The excellent performance capabilities of the pneumatic servo bearing actuator mean that it should be directed primarily at applications in the semiconductor industry requiring ultraprecise positioning.

机译：气动伺服轴承致动器的出色性能意味着它应主要针对需要超精密定位的半导体行业中的应用。

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来源
《The Twenty-third annual meeting of the American Society of Precision Engineering and the Twelfth ICPE》|2008年|328-331|共4页
会议地点 Portland OR(US);Portland OR(US);Portland OR(US);Portland OR(US)
作者
Katsumi Sasaki; Tomoko Hirayama; Hiroshi Yabe;
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作者单位

Pneumatic Servo Controls Ltd. 2266-22 Anagahora, Shimo-Shidami, Moriyama-ku, Nagoya, Aichi, Japan;

Dept. of Mechanical Engineering, Doshisha University 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto, Japan;

Kyoto University (former affiliation) Yoshida-honmachi, Sakyo-ku, Kyoto, Japan;

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原文格式 PDF
正文语种 eng
中图分类仪器、仪表;
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2. Development of ultraprecise positioning X–Y stage composed of pneumatic servo bearing actuators [J] . Journal of Engineering Tribology . 2011,第7期

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3. Development of ultraprecise positioning X-Y stage composed of pneumatic servo bearing actuators [J] . A. Sugimoto, H. Danjo, T. Kitagawa, Proceedings of the Institution of Mechanical Engineers, Part J. Journal of engineering tribology . 2011,第7期

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4. PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING - PART 2: A NEW APPROACH TO ULTRA-PRECISION MOTION CONTROL [C] . Katsumi Sasaki, Tomoko Hirayama, Hiroshi Yabe Annual Meeting of The American Society for Precision Engineering . 2008

机译：用于超精密定位的气动伺服轴承执行器 - 第2部分：超精密运动控制的新方法
5. Exploiting natural characteristics of pneumatic servo-actuation through multi-input control. [D] . Shen, Xiangrong. 2006

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6. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response Large Stroke and Nanometer Accuracy [O] . Mao-Hsiung Chiang 2010

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PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING - PART 2: A NEW APPROACH TO ULTRA-PRECISION MOTION CONTROL

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