CYCLOOCTATETRAENETRICARBONYLRUTHENIUM COMPLEX, PROCESS FOR PRODUCING SAME, AND PROCESS FOR PRODUCING FILM USING THE COMPLEX AS RAW MATERIAL

摘要

The present invention provides ruthenium compounds suitable for chemical vapor deposition (CVD). A liquid cyclooctatetraenetriarbonyl ruthenium complex of the following formula (1) is obtained by irradiating light to a mixed solution of dodecacarbonyltriutanium and a cyclooctatetraene compound. A satisfactory ruthenium film or ruthenium oxide film can be easily obtained by chemical vapor deposition using the complex as a raw material.