CYCLOOCTATETRAENETRICARBONYLRUTHENIUM COMPLEX, PROCESS FOR PRODUCING SAME, AND PROCESS FOR PRODUCING FILM USING THE COMPLEX AS RAW MATERIAL

摘要

To provide a ruthenium compound suitable for a chemical vapor deposition method (CVD method). A liquid cyclooctatetraenetricarbonyl ruthenium complex represented by the following Formula (1) is obtained by irradiating a solution mixture of dodecacarbonyl triruthenium and a cyclooctatetraene with light. A satisfactory ruthenium film or ruthenium oxide film can be easily obtained by a chemical vapor deposition method using the complex as a raw material.