METHOD FOR CHANGING PHYSICAL PROPERTIES OF THIN FILM USING ACTIVATED ELECTRON BEAM

摘要

The present invention relates to a method for changing physical properties of a thin film using an activated electron beam which can greatly improve a change rate of the physical properties while required time is considerably reduced by using the activated electron beam. The method for changing physical properties of a thin film using an activated electron beam according to the present invention comprises: irradiating the activated electron beam on a partial area of a target film; and converting the target film irradiated with the electron beam into a complex phase having two phases or more.;COPYRIGHT KIPO 2015