CASSETTE, APPARATUS FOR LOADING SUBSTRATE, APPARATUS FOR UNLOADING SUBSTRATE, AND SYSTEM AND METHOD FOR MOVING THE SUBSTRATE USING THE SAME

摘要

An apparatus for loading a substrate, an apparatus for unloading a substrate, and a system and a method for carrying a substrate using the same are disclosed. A cassette according to an embodiment of the present invention comprises: one or more air pipes having an air passage inside; one or more absorption holes formed in the air pipes to absorb a substrate loaded on the top of the air pipes; and a coupler which is arranged on one side of the air pipes and is connected to the inside of the air pipes. The coupler is connected to an air pump for sucking the air inside the air pipes to absorb the substrate using the absorption holes.