首页> 外国专利> PILLAR ON PAD INTERCONNECT STRUCTURES, SEMICONDUCTOR DICE AND DIE ASSEMBLIES INCLUDING SUCH INTERCONNECT STRUCTURES, AND RELATED METHODS

PILLAR ON PAD INTERCONNECT STRUCTURES, SEMICONDUCTOR DICE AND DIE ASSEMBLIES INCLUDING SUCH INTERCONNECT STRUCTURES, AND RELATED METHODS

机译:包括这种互连结构的PAD互连结构,半导体管芯和管芯组件上的支柱以及相关方法

摘要

Methods of fabricating interconnect structures for semiconductor dice comprise forming conductive elements in contact with bond pads on an active surface over a full pillar diameter of the conductive elements, followed by application of a photodefinable material comprising a photoresist to the active surface and over the conductive elements. The polyimide material is selectively exposed and developed to remove photodefinable material covering at least tops of the conductive elements. Semiconductor dice and semiconductor die assemblies are also disclosed.
机译:制造用于半导体管芯的互连结构的方法包括:在导电元件的整个柱直径上,形成与有源表面上的键合焊盘接触的导电元件,然后将包括光致抗蚀剂的可光界定材料施加到有源表面上和导电元件上。聚酰亚胺材料被选择性地暴露和显影以去除覆盖至少导电元件顶部的可光定义材料。还公开了半导体管芯和半导体管芯组件。

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