MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL METROLOGY

摘要

The structural parameters of the sample are determined by fitting the measurement results collected by different measurement techniques in the combined analysis to the response model of the sample. The model of the sample response to at least two different measurement techniques shares at least one common geometry parameter. In some embodiments, the model building and analysis engine performs x-ray and optical analysis where at least one common parameter is coupled during analysis. The fitting of the response model using measurement data can be done sequentially, in parallel, or by a combination of sequential and parallel analysis. In a further aspect, the structure of the response model is modified based on the quality of the pit between the model and the corresponding measurement data. For example, the geometric model of the sample is reconstructed based on the pit between the response model and the corresponding measurement data.