ANGLE CALIBRATION FOR GRAZING-INCIDENCE X-RAY FLUORESCENCE (GIXRF)

摘要

Angle calibration comprises the step of orienting x-ray beam to be incident on a position on a surface of a sample in a grazing angle. An x-ray fluorescence excited on the position is measured. A reflected angle of the x-ray beam and a transmitted angle of the x-ray beam from the surface are measured. A incident angle of the x-ray on the surface is judged by using the measured reflected angle and the transmitted angle, and the measured x-ray fluorescence is analyzed by using the judged incident angle.