ANGLE CALIBRATION FOR GRAZING-INCIDENCE X-RAY FLUORESCENCE GIXRF

摘要

The present invention includes directing an X-ray beam to be incident at a grazing angle at a location on the surface of the sample. X-ray fluorescence excited at this position is measured. The reflection angle of the X-ray beam and the transmission angle of the X-ray beam from the surface are measured. The incident angle of X-rays on the surface is evaluated using the measured reflection and transmission angles, and the measured X-ray fluorescence is analyzed using the evaluated incident angles.