ELECTROSTATIC CHUCK DEVICE TO TRANSFER SUBSTRATE AND SUBSTRATE TRANSFERRING DEVICE WITH SAME

摘要

The present invention relates to an electrostatic chuck device to transfer a substrate, and a substrate transferring device with the same. The electrostatic chuck device to transfer the substrate comprises: an electrostatic chuck to chuck the substrate with an electrostatic force; and a dechucking unit mounted on a groove on one side or an inner part of the electrostatic chuck, consisting of a bimetal to push the substrate by heating and deformation. The substrate transferring device comprises: a base part; at least one robot arm connected to the base part, capable of a rotating operation or a straight operation; a robot band connected to the robot arm; the electrostatic chuck coupled to the robot band; and the dechucking unit mounted on the groove of one side or an inner part of the electrostatic chuck, consisting of a bimetal to push the substrate by heating and deformation.;COPYRIGHT KIPO 2016