The present invention, the total weight of the composition of 12 to 35% by weight, based on the hydrogen peroxide, 0.5 to 5 wt. % of sulfate, 0.5 to 5% by weight of phosphate, 0.0001 to 0.5% by weight of fluoride that can provide fluoride ions, 0.1 to 5% by weight of a first water-soluble cyclic amine, from 0.1 to 5% by weight of a chelating agent, 0.1 to 5% by weight of the second water-soluble cyclic amine, from 0.1 to 5% by weight of the total composition of glycol total weight of the copper film containing deionized water such that 100% by weight, a copper / molybdenum having nyummak or copper / molybdenum relates to an etching composition denyum alloy film. ; In another aspect, the present invention constituting the gate TFT (Thin Film Transistor) of a liquid crystal display (Gate), the source (Source) and drain (Drain) electrode metal characterized in that the copper layer used in the etching process of the wiring, copper / mol relates to nyummak or copper / molybdenum alloy film etching composition having ribs. ; etch composition, copper, copper / molybdenum, a liquid crystal display
展开▼
