METHOD FOR MANUFACTURING HIGH SENSITIVE HYBRID SENSOR CHIP FOR SENSING HEAVY METAL IN WATER AND PORTABLE WATER QUALITY MONITORING APPARATUS USING SAME

摘要

According to a method for manufacturing hybrid water quality sensor chip according to the present invention, a piezoresistive layer, a first electrode layer including a working electrode and a counter electrode, and a second electrode layer including a reference electrode are formed on an silicon wafer substrate using a micro electro mechanical system (MEMS) process to machine-chemically measure heavy metal in water by allowing a microbridge to detect change in resistance of the piezoresistive layer when heavy metal is present and to electrochemically measure heavy metal in water by detecting change in current generated between the working electrode and the counter electrode when heavy metal is present, thereby manufacturing a subminiature water quality sensor chip with high sensitivity and high selectivity. Also, according to the present invention, the portable water quality test apparatus includes: a heavy metal sensor unit including the hybrid water quality sensor chip to measure various types of heavy metals, changing the heavy metals as necessary; and an external output means connected with a display device separately installed on the outside such that data on the measured heavy metal is easily visualized by a mobile or a signal sending device and a receiving display device performing wireless communication, thereby quickly and accurately detecting the concentration and types of heavy metal included in water regardless of place.;COPYRIGHT KIPO 2015