APPARATUS AND METHOD FOR EXTREME ULTRAVIOLET GENERATION AND SPECTROMETER CALIBRATION

摘要

The present invention relates to an apparatus and a method for extreme ultraviolet generation and spectrometer calibration, and has an advantage of accurately measuring wavelengths of spectrum of extreme ultraviolet light used in an extreme ultraviolet exposure technique and a mask inspection technique. The apparatus for extreme ultraviolet generation and spectrometer calibration comprises: a means for generating extreme ultraviolet light; an extreme ultraviolet generating module; and an extreme ultraviolet spectrometer calibration device.;COPYRIGHT KIPO 2015